國研院奈米實驗室

研究人力

組別：奈米CMOS元件平台組

姓名：謝健

職稱：副研究員

學歷：

國立成功大學材料科學及工程博士

經歷：

國家奈米元件實驗室營運組組長
國家奈米元件實驗室奈米製造與功能性材料計畫主持人
國家奈米元件實驗室奈米製造/元件技術組組長

研究與技術專長：

材料科學
薄膜製程
奈米技術

個人著作：(點擊以展開)

期刊論文

W. H. Lai, M. H. Hon, L. G. Teoh, Y. H. Su, J. Shieh, C. K. Chen, 2008/8 “Field-Emission Performance of Wormhole-Like Mesoporous Tungsten Oxide Nanowires” J. of Electronic Materials 37, 1082-1087 SCI/2007: 1.320, EI
K. C. Hsieh, Hsuen-Li Chen, D. H. Wan, J. Shieh, 2008/3 "Active modulation of surface plasmon resonance wavelengths by applying an electric field to gold nanoparticle-embedded ferroelectric films" J. of Physical Chemistry C 112, 11673-11678.
T. S. Ko, J. Shieh, M. C. Yang, T. C. Lu, H. C. Kuo, S. C. Wang, 2008/3 “Phase transformation and optical characteristics of porous germanium thin film” Thin Solid Films 516, 2934-2938 SCI /2007: 1.693, EI
Wei Hao Lai, Lay Gaik Teoh, Yen Hsun Su, Jiann Shieh, and Min Hsiung Hon, 2007/12 “Effect of Calcination on Crystallinity for Nanostructured Development of Wormhole-Like Mesoporous Tungsten Oxide”, J. the American Ceramic Society 90, 4073-4075 SCI/2007: 1.792, EI
W.H. Lai, L.G. Teoh, Y.H. Su, J. Shieh, M.H. Hon, 2007/7 ”Hydrolysis reaction on the characterization of wormhole-like mesoporous tungsten oxide” Journal of Alloys and Compounds 438, 247-252. SCI/2007: 1.455, EI
(invited) J. Shieh,* C. H. Lin, M. C. Yang, 2007/4 “Plasma Nanofabrications and Antireflection Applications” J. Phys. D: Applied Physics 40, 2242-2246 SCI/2007: 2.200, EI
T. C. Cheng, J. Shieh, W. J. Huang, M. C. Yang, M. H. Cheng, H. M. Lin, and M. N. Chang, 2006/6 “Hydrogen plasma dry etching method for field emission application” Appl. Phys. Lett. 88, 263118. SCI/2007: 3.596, EI
Wei Hao Lai, Jiann Shieh, Lay Gaik Teoh, Min Hsiung Hon, 2006/1, “Fabrication of one-dimensional mesoporous tungsten oxide” Nanotechnology 17, 110 SCI/2007: 3.310, EI
Ming-Che Yang, Jiann Shieh,* Chiung-Chih Hsu, Tsung-Chieh Cheng, 2005/10, “Well-aligned Silicon Nanograss Fabricated by Hydrogen Plasma Dry Etching”, Electrochem. Solid-State Lett. 8, C131-133. SCI/2007: 2.109, EI
Ming-Che Yang, Jiann Shieh,* Tsung-Shine Ko, Hsuen-Li Chen, and Tieh-Chi Chu, 2005/7, “Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS mechanism”, Jap. J. Appl. Phys. 44, 5791-5794 SCI/2007: 1.247, EI
An-Thung Cho, Jia-Min Shieh, Jiann Shieh, Yi-Fan Lai, Bau-Tong Dai, Fu-Ming Pan, Hao-Chung Kuo, Yong-Chang Lin, Kuei-Jung Chao, and Pang-Hung Liu, 2005/6, “Emission of Bright Blue Light from Mesoporous Silica with Dense Si (Ge) Nanocrystals”, Electrochem. Solid-State Lett. 8, G143-146. SCI/2007: 2.109, EI
Ming-Jui Yang, Jiann Shieh, Shih-Lu Hsu, Ing-Jye Huang, Ching-Chich Leu, Shih-Wen Shen, Tiao-Yuan Huang, Peer Lehnen, and Chao-Hsin Chien, 2005/5, “Low-Temperature Growth of Polycrystalline Ge Films on SiO2 Substrate by HDPCVD”, Electrochem. Solid-State Lett. 8, C74-76. SCI/2007: 2.109, EI
W. H. Lai, J. Shieh, L. G. Teoh, I. M. Hung, C. S. Liao, M. H. Hon, 2005/6, ”Effect of copolymer and additive concentrations on the behaviors of mesoporous tungsten oxide”, J of Alloys and Compounds 396, 295-301. SCI/2007: 1.455, EI
L. G. Teoh, J. Shieh, W. H. Lai, I. M. Hung, M. H. Hon, 2005/6, “Structure and Optical Properties of Mesoporous Tungsten Oxide”, J of Alloys and Compounds 396, 251-254. SCI/2007: 1.455, EI
J. Shieh* and M.H. Hon, 2005/1 “Observation of plastic deformation in TiAlCN/a-C ceramic nanocomposite coating”, Applied Physics A 80, 131-134. SCI/2007: 1.857, EI
Jiann Shieh,* Tsung Shine Ko, Hsuen Li Chen, Bau Tong Dai, and Tieh Chi Chu, 2004/10 “Low-temperature growth of germanium quantum dots on silicon oxide by inductively coupled plasma chemical vapor deposition”, Chemical Vapor Deposition 10, 265-269. SCI/2007: 1.936, EI
Lay Gaik Teoh, Jiann Shieh, Wei Hao Lai, Min Hsiung Hon, 2004/9 “Effects of Mesoporous Structure on Grain Growth of Nanostructured Tungsten Oxide”, J. Materials Research 19, 2687-2693. SCI/2007: 1.916, EI
Jiann Shieh,* Hsuen Li Chen, Tsung Shine Ko, Hsu Chun Cheng, and Tieh Chi Chu, 2004/7, “Nanoparticle-Assisted Growth of Porous Germanium Thin Film”, Advanced Materials 16, 1121-1124. SCI/2007: 8.191, EI
L.G. Teoh, I.M. Hung, J. Shieh, W.H. Lai, and M.H. Hon, 2003/11 “Sensitivity properties of a novel NO2 gas sensor based on mesoporous WO3 thin film”, Sensors and Actuators B 96, 219-225. SCI/2007: 2.934, EI
L.G. Teoh, I.M. Hung, J. Shieh, W.H. Lai, and M.H. Hon, 2003/8 “High Sensitivity Semiconductor NO2 Gas Sensor Based on Mesoporous WO3 Thin Film” Electrochem. Solid-State Lett. 6, G108-111. SCI/2007: 2.109, EI
J. Shieh,* H. M. Feng, M. H. Hon, and H. Y. Juang, 2002/8 “WO3 and W-Ti-O thin-film gas sensors prepared by sol-gel dip-coating”, Sensors and Actuators B 86, 75-80. SCI/2007: 2.934, EI
Jiann Shieh,* Hsiao Lei Wang, Ming Shyong Tsai, and Min Hsiung Hon, 2002/3 “Effects of Coffee-bean-like Morphology and Graded Interlayer on Texture Evolution of PECVD-deposited Titanium Carbonitride Films”, J. the American Ceramic Society 85, 636-640. SCI/2007: 1.792, EI
Jiann Shieh* and Min Hsiung Hon, 2002/1, “Plasma enhanced chemical vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films”, J. Vacuum Science Technology A 20, 87-92. SCI/2007: 1.278, EI
J. Shieh* and M. H. Hon, 2001/7, “Nanostructure and hardness of titanium aluminum nitride prepared by plasma enhanced chemical vapor deposition”, Thin Solid Films 391, 101-108. SCI /2007: 1.693, EI

會議論文

Jiann Shieh, Bing Shian Chen, Fu Ju Hou, Shun Po Yang, Wen Hsien Huang, Chao Chia Cheng, “Low-reflective hydrophilic Silicon Nanograss” 33th Micro- and Nano-Engineering (oral). Sep. 93-26, 2007, Copenhagen, Denmark.
Jiann Shieh, Bing Shian Chen, Fu Ju Hou, Shun Po Yang, Wen Hsien Huang, Chao Chia Cheng, “Low-reflective hydrophilic Silicon Nanograss” Micro- and Nano-Engineering (oral). Sep. 23-26, 2007, Copenhagen, Denmark.
Jiann Shieh and Ming-Che Yang, “Large-area antireflection subwavelength nanograss structure prepared by hydrogen plasma etching” E-MRS 2006 Spring Meeting. May 29-Jun. 2, Nice, France.
J. Shieh, C.C. Hsu, M.C. Yang, and T.C. Cheng, “Well-aligned Silicon Nanograss Fabricated by Hydrogen Plasma Etching without Mask and Catalyst” European Congress on Advanced Materials and Processes, Sep. 5-8, 2005, Prague, Czech Republic.
J. Shieh and M. H. Hon, “Observation of plastic deformation in TiAlCN/a-C ceramic nanocomposite coating” AVS 51st International Symposium & Exhibition, Nov. 14-19, 2004, Anaheim, CA, USA.
Ming-Che Yang , Jiann Shieh, Tsung-Shine Ko, Hsuen-Li Chen, and Tieh-Chi Chu “Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS mechanism” 2004 International Microprocesses and Nanotechnology Conference, Oct. 26-29, 2004, Osaka, Japan.
Wei-Hao Lai, Chien-Shuen Liao, Jiann Shieh, Lay-Gaik Teoh, I-Ming Hung, Min-Hsiung Hon, “Effect of copolymer and additive concentrations on the behaviors of mesoporous tungsten oxide” International Mesostructured Materials Symposium, 1-4 May 2004, Cape Town, South Africa.
L. G. Teoh, J. Shieh, W. H. Lai and M. H. Hon, “Preparation of Mesoporous WO3 Nanocrystalline Thin Films for Sensor Application” 1st International Symposium on Active Nano-Characterization and Technology, Nov. 11-Nov. 14, 2003, National Institute for Materials Science, Tsukuba, Japan.
Jiann Shieh and Min Hsiung Hon, “Plasma enhanced chemical vapor deposition of titanium aluminum carbonitride/amorphous-carbon nanocomposite thin films”, Second Asia-Pacific International Symposium on the Basis and Application of Plasma Technology, Kaohsiung, 2001.
J. Shieh, H.L. Wang, M. S. Tsai, and M. H. Hon, “Functionally gradient PECVD Ti(C,N) coatings”, Mat. Res. Soc. Symp. Proc. 555, 407 (1999). (EI)

專書論文

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